TPT March 2012

T echnology N ews

Field emission scanning HITACHI High-Technologies has launched the SU8000 family of ultra-high resolution field emission scanning electron microscopes (FESEMs) for investigating the fine surface structure of materials in a wide range of nanotechnology fields. The SU8000 series features a common, high performance electron optical platform to provide imaging performance, and offers a variety of stages, chambers and signal detection systems to meet the wide variety of customer-specific needs for ultra high resolution microscopy. The new SU8010, SU8020 and SU8030 join the existing SU8040 to form a comprehensive family of ultra high resolution microscopes. A high brightness cold cathode field emission source is used in combination with the latest generation of Hitachi’s patented super ExB in-lens detection systems for energy filtering, charge suppression and contrast control. All microscopes offer excellent imaging performance at low accelerating voltage to minimise sample damage, and enhanced electron deceleration technology has improved resolution at ultra low landing voltages to just 1.3nm at 1.0kV. All models of the SU8000 range are equipped with specimen exchange chambers and lens-integrated liquid nitrogen traps as standard, ensuring high chamber vacuum and thus minimised contamination. The SU8010 is the entry-level model with dual (upper and lower) secondary electron detectors with secondary and backscattered electron signal mixing capabilities for versatile imaging. A three-axis motorised stage is provided, capable of accommodating samples up to 100mm diameter. The SU8020 offers the same sample handling capabilities using a five-axis motorised stage as standard, but benefits from Hitachi’s triple detector system to extend the capability to collect secondary electrons and low energy backscattered electrons. This novel, ultra-sensitive detection system allows high efficiency, simultaneous multi-signal imaging and energy filtering even in beam

The SU8030 model

deceleration mode, providing the capability to observe the absolute surface structure as well as properties such as surface potential contrast. Hitachi High-Technologies Corporation – UK

Email: eminfo@hht-eu.com Website: www.hht-eu.com

89

www.read-tpt.com

M arch 2012