1Q16 ASML Digital Newsroom Final

ASML Digital Newsroom

AN EXCLUSIVE LOOK AT NEW U.S. DEVELOPMENTS FOR THE PRESS

What’s Inside

Page 04 New EUV source power and dose margin milestone - 210W at 12% achieved in San Diego

Page 06 ASML and NCS deliver faster, more accurate design to mask solution for foundries

Page 10 Negative tone development improves contrast; new model improves patterning

The content of ASML Digital Newsroom is intended for informational purposes only and is not an official branded publication. Should you have interest in the news, please contact myself for copies of the article and/or multi-media collateral, or to secure a follow-up discussion with an ASML expert. 1 ASML Digital Newsroom

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