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ELECTRONIC DEVICE FAILURE ANALYSIS | VOLUME 21 NO. 3 42 Ted Kolasa, Northrop Grumman ted.kolasa@gmail.com 3D X-RAY MICROSCOPY SYSTEM SPEEDS UP SUB-MICRON IMAGING Standard x-ray computed tomography (CT) is limited to small sample sizes when imaging at high resolution due to the geometric nature of magnification. Yet main- taining high resolution for larger samples is impossible because of the longer working distances required. High resolution imaging in CT systems also requires low x-ray flux, reducing measurement throughput. This limits the practical application of maximum resolution claimed by most CT manufacturers. The Zeiss Xradia 600-series Versa overcomes these trade-offs by integrating dual-stage magnification archi- tecture with high flux x-ray source technology. Carl Zeiss, Thornwood, N.Y., specifies true spatial resolution, bringing a standard measure of microscope performance to 3D x-raymeasurement. Spatial resolution refers to the minimum separation at which two features can be resolved by an imaging system. The new600-series Versa systemobtains true spatial resolutionof 500nmwith a minimum achievable voxel size of 40 nm. The new system also introduces a breakthrough high power (25 W) x-ray source technology that can provide significantly higher x-ray flux compared to its predeces- sors. The new source improves thermal management, increases flux and throughput, and preserves resolution

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performance. A new source control systemboosts source responsiveness, enabling faster scan setup and a better user experience. Higher x-ray flux provides a number of benefits, includ- ing faster tomography scans, higher sample run rates, coverage of more regions of interest, a higher contrast- to-noise ratio, stronger diffraction patterns, and accom- modation of long/multi-scanworkflows (in situ, DSCoVer, stitching, and DCT). For more information, visit zeiss.com. COMPACT NANOPOSITIONING SYSTEM ACHIEVES FAST ACTIVE ALIGNMENT Physik Instrumente (PI), Auburn, Mass., offers a compact system suitable for nanopositioning, fiber alignment, scanning microscopy, and more. Based on a parallel-kinematic design with only one lightweight moving platform for all three axes, the P-616 NanoCube is available with high precision and dynamics in a compact package. It is reportedly the smallest and lightest platform system with capacitive feedback delivering a 100-µm travel range in three degrees of freedom. The piezo scanner can be combined with compact motorized micropositioning stages such as PI’s L-505 miniature stage to achieve travel ranges up to 1 in. The P-616 is operated with PI’s E-727 digital servo piezo controller, which offers higher linearity, faster set- tling and scanning speeds, and easier access to all motion parameters compared to conventional analog piezo con- trollers. An extensive software package includes drivers for LabVIEW and MATLAB, as well as dynamic libraries for Windows and Linux. The NanoCube supports USB, SPI, RS-232, and analog interfaces. Additional functions include wave generation, data recording, auto zeroing, and trigger input/output. In addition to the entry-level open loop steppermotor variants, closed loopmodels are availablewith integrated linear encoders. Encoderswith 50 nmand 5 nmresolution are offered. The linear encoders provide direct position measurement at the motion platform and provide better accuracy and repeatability compared to conventional motor shaft-mounted rotary encoders.

Zeiss Xradia 620 Versa 3D x-ray microscope.

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