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MICSYS-SA1
Series 549
This high-accuracy non-contact 2D encoder uses image correlation.
The MICSYS-SA1 offers you the following benefits:
– Simultaneous XY position measurements.
– Nanometer resolution.
– Possible to measure on workpiece.
– You can align it easily.
– It allows you to carry out minute strain and deflection measurements.
Applications:
- Nano positioning
- Monitor performance of metrology and manufacturing frames (drift, hysteresis, repeatability)
- Measure deformation
549-701D
No.
549-701D
Specifications
Digital step
1 nm
Accuracy
± 100 nm
Linearity (at 20°)
80 nm
Working distance
10±0,2 mm (including
thickness of standard target :
6,1 mm)
Data Update Period
20Hz
Laser wavelength
650 nm (Visible) Class 2
Operating
temperature and
humidity
Detector: 15 - 25°C, I/F unit:
0-40°C, 20 - 80 % RH (Non-
condesing)
Interface
RS-232C
Standard accessories
Standard target, Sample
software for data
correclation (on CD-ROM)
Power supply
AC100-240V 45W 50/60Hz
Refer to the Micsys brochure for more details
All products to be sold to commercial customers.
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All products to be sold to commercial customers. Product illustrations are without obligation. Product descriptions, in particular any and all
technical specifications, are only binding when explicitly agreed upon. For suggested retail prices, please refer to the separate price list.