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1. Determine (once) k

Q,Co

, dependent on chamber

type

and Q

1. determine Q: TPR

20,10

(



effective beam attenuation coefficient)

2. determine k

Q,Co

: look-up table TRS 398 for NE2571 and TPR

20,10

D

w,Q

= M

Q

∙N

D,w,Co

∙k

Q,Co

∙



k

i