450 / 1840
Paris system forecast relationship
--
Stepping source
Implant
type
Treated
length /
radioactive
Treated
thickness
Lateral
margin /
Safety
margin /
length
/spacing spacing spacing
2 lines
0.8
0.5 0.37 -
n lines in
one plane
0.8
0.6 0.33 -
n lines in
«square»
0.8
1.55 to
1.60
-
0.27
n lines in
triangle
0.8
1.3
-
0.20
23