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Interpretation of the effect of disturbances:
Impact on geometrical accuracy
mnzyx
mnzyx
distorted
, , , ,
, , , ,
1 1 1
Group x-terms for distortions in read-out direction:
tnGx tnzyx B tnzyxB t
n xG
x
G
x
x
1
0
), ,(
) , ,
(
and solve for x
1
x
G
x
G
zy
x B
G
zyxB
x x
x
) , ,(
) , ,(
0
1