890-891 / 3107
10
15
Displacement (mm)
trend =
0.15 mm/fraction
Performance NAL and eNAL in presence of time trend
-5
0
5
0
5
10
15
20
25
30
35
: with NAL setup correction
Residue sys err = 3 mm
Fraction
: without setup correction
Sys err = 7.5 mm