892-893 / 3107
10
15
Displacement (mm)
trend =
0.15 mm/fraction
Performance NAL and eNAL in presence of time trend
-5
0
5
0
5
10
15
20
25
30
35
Fraction
: without setup corrections
Systematic error reduced from
7.5 to 1.3 mm
: with eNAL setup correction