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3. Calculation of scattered electron fluence

, ,

,

= −

, ,

,

( )

+න

4

, ,

(

,

)

→ , ,

,

; ,

+න

4

, ,

(

,

)

→ , ,

,

; ,

4

, ,

(

,

)

→ , ,

,

; ,

+

∆ , ,

(

,

)