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World-leading nano-electronics

research center imec and

Synopsys, Inc. (NASDAQ: SNPS)

announced an interconnect

resistivity model to support

the screening and selection of

alternative interconnect metals

and liner-barrier materials at the

7nm node and beyond. With the

continued scaling of advanced

process nodes, the impact of

parasitic interconnect resistance on the switching delay of

standard cells rises considerably. The new model developed

through this collaboration enables the evaluation of interconnect

material and process options through simulations in the early

stages of technology development, when wafer data is not

available, and in the process optimization and integration stages

of technology development, where it reduces expensive and

time-consuming wafer-based iterations.

Imec and Synopsys Collaborate on Interconnect Resistivity

Model to Enable Early Screening of Interconnect Technology

Options at Advanced Nodes

automatically be sent to the medical centre If you

apply this sensor to your sports gear, you can be served

more detailed and improved training service for yourself.

For example, the sensor detects the pressure of your hands

on the golf club as well as the position of your hands. Then,

it sends the information to your smartphone to help you

find the perfect grip.

You can attach these sensors to automotive for safety and

convenience. The sensor under-stands your posture, body

type and weight to automatically correct height of car-seat

or pressure of airbag.

If you apply the sensor to a chair, it measures the pressure

on the seat and sends the data to you. You can use this

information to correct your posture or analyze your study

patterns.

The company developed special polyurethane material that

is sensitive to the pressure and has great elasticity, and

inserted the material between the electronic fibers. When

“We have already released to

our partners a number of sets

of model parameters related

to various liner/barrier systems

for Cu metallization or to

alternative metals, such as Ru

and Co, which they will use to

screen metallization options for

next-generation

interconnect

technologies,” stated Dan Mocuta,

director, Logic Device and Integration at imec.

To use the new resistivity model, customers simulate the

fabrication of the interconnect structure in 3D using the Synopsys

process emulation tool Process Explorer, and then simulate the

wire and via resistance in Raphael, the Synopsys gold standard

interconnect field solver. This simulation flow accounts for the

impact of layout rules, multi-patterning flows, and process-

induced 3D features on the resistance of any conductive net

in a multilayer interconnect stack, thereby predicting the

an external force is applied to the sensor, electric poles

inside the fiber detect the deformation to de-termine the

pressure.

This product is very durable in various environments. It

works normally over 240 hours from 40 degrees below zero

to 80 above zero. A sensor remains functional even after

the average 70-kg man sit on the sensor 100,000 times.

Changhwan Kim, Head of the LG Innotek’s R&D Center

said, “We tried to break away from the previous method

and attempt new methods to develop innovative products.”

He also said, “We will continue to develop materials and

components in various fields to provide new experiences

to our customers.”

According to BBC Research & Consulting, a global market

research institute, the global pressure sensor market is

expected to grow from USD 11.5 billion in 2014 to USD

16.3 billion in 2019. The annual average growth rate is

expected to be 7.2% between 2014 and 2019.

12 l New-Tech Magazine Europe