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Interpretation of the effect of disturbances:
Impact on geometrical accuracy
(
)
(
)
mnzyx
mnzyx
distorted
, , , ,
, , , ,
1 1 1
Φ=
Φ
Group x-terms for distortions in read-out direction:
tnGx tnzyx B tnzyxB tn xG
x
G
x
x
∆ =∆
∆+∆
∆+∆
1
0
) , ,(
) , ,(
γ
γ
γ
γ
and solve for x
1
x
G
x
G
zyx B
G
zyxB x x
x
) , ,(
) , ,(
0
1
∆
+
∆
+=